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    Master The Core Technology Control The Use Of Light

    Semiconductor

    VIA wafer depth measurement

    Date：2020-06-04 Source：Samsun Technology

    VIA wafer depth measurement using white light spectral interferometric sensors

    VIA wafer depth measurement_shanqinquan.com
    Wafer depth measurement 3D profile



    VIA wafer depth measurement_shanqinquan.com
    Depth measurement 2D topography

     


    VIA wafer depth measurement_shanqinquan.com
    Depth = 112.3 +/-0.4 μm


     

    VIA wafer depth measurement_shanqinquan.com
    Depth = 65.28 +/- 0.1 μm

     

    VIA wafer depth measurement_shanqinquan.com

    Depth = 87.28 +/- 0.6 μm


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